Olgierd-

Perhaps wafer dicing tapes leave fewer residues? Try some of the dicing
tape suppliers and see what they say.

Michael Alderete
Mechanical Packaging Engineer
DRS Sensors & Targeting Systems, Inc.
10600 Valley View St.
Cypress CA 90630-4833
[email protected]
TEL (714) 220-4410
FAX (714) 220-5583

-----Original Message-----
Date: Wed, 19 Mar 2008 18:57:01 +0100
From: "Olgierd Cybulski" 
Subject: Re: [mems-talk] removing sticky adhesive
To: [email protected], "General MEMS discussion"
        
Message-ID:
        <[email protected]>
Content-Type: text/plain; charset=ISO-8859-1

>  is there a way to remove sticky adhesive, which is left over after a
>  cellotape is removed. we are using cello tape for masking while
etching
>  SiN, and when cellotape is peeled of the sticky glue is left over. Is
there
>  a better way to remove it with out scrubbing?

It depends on the type of glue.  Try IPA, extraction naphtha or benzine.
Sometimes acetone is enough.