Hi,

Try immersing in toluene at room temperature. You could also try boiling,
under reflux, in acetone or toluene. Acetone has a bp of around 57 deg C, so
if this does not do the trick, you could use something else in the ketone
family with a higher bp: something like 3-pentanone (aka pentan-3-one). You
can then heat it to a higher temperature during the adhesive removal
process, and hopefully the extra input of energy will help to disolve the
adhesive. The process can be agitation free, despite the presence of
bubbles, if the sample is secured.

Try toluene at RT first, if the problem persists try acetone under reflux.
If either of these don't do the trick, move onto pentanone under reflux (use
proper reflux apparatus) - this can be left for several hours, but be
careful to ensure it is not left overnight or over the weekend, in case
reflux is not very successful, and the solvent evaporates sooner than you
think.

Good luck and let us know how things turn out.

Regards,

Michael


> ---------- Forwarded message ----------
> From: "Olgierd Cybulski" 
> To: [email protected], "General MEMS discussion"  >
> Date: Wed, 19 Mar 2008 18:57:01 +0100
> Subject: Re: [mems-talk] removing sticky adhesive
> >  is there a way to remove sticky adhesive, which is left over after a
> >  cellotape is removed. we are using cello tape for masking while etching
> >  SiN, and when cellotape is peeled of the sticky glue is left over. Is
> there
> >  a better way to remove it with out scrubbing?
>
> It depends on the type of glue.  Try IPA, extraction naphtha or benzine.
> Sometimes acetone is enough.