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MEMSnet Home: MEMS-Talk: Using AP300
Using AP300
2008-03-24
Peng Li
2008-03-25
Eric D. Johnston
2008-03-25
Peng Li
Using AP300
Peng Li
2008-03-25
Hey Eric,

Thanks for your information. I also had a lot success when humidity is
low. However, it is just annoying to be influenced by this. I am wondering
using some adhesion promoter like AP300 would minimize the influence of
humidity and also give me better adhesion. Hope we could have more
discussions here. Thanks!

Peng

Dept. of Mech. Eng.
Univ. Rhode Island

> Peng
>
> I just had a bad experience with SU8 and humidity.  Ours was up to 55%.  I
> tried spincoating Si wafers with SU8.  It looked good, but shortly after,
> I found it all beaded up on the wafer.  After we fixed the humidity, it
> worked fine.  It should normally be around 10%.
>
> Eric
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