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MEMSnet Home: MEMS-Talk: PECVD oxide conductivity
PECVD oxide conductivity
2008-03-25
Ho Yin Chan
2008-03-25
Edward Sebesta
2008-03-25
Kirt Williams
PECVD oxide conductivity
Ho Yin Chan
2008-03-25
Hi all,

  I am putting Ti/Au metal lines on top of 1um PECVD oxide at ~380C. I found
there is finite reisstance between the metal lines. Those are parallel lines
with 100um wide and 2mm long. They are seperated at a distance of 40um. I am
curious the reason behind it. I tried to measure the resistivity of PECVD
oxide. It shows > 10E14 Ohm cm.

 Thank you.

-- HY
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