Oxygen plasma is 100% successful in removing sticky tape residue.
Contact me for further details. www.yieldengineering.com ,
[email protected] 925 373 8353.  BillMoffat

________________________________

From: [email protected] on behalf of Olgierd Cybulski
Sent: Wed 3/19/2008 10:57 AM
To: [email protected]; General MEMS discussion
Subject: Re: [mems-talk] removing sticky adhesive

>  is there a way to remove sticky adhesive, which is left over after a
>  cellotape is removed. we are using cello tape for masking while =
etching
>  SiN, and when cellotape is peeled of the sticky glue is left over. Is =
there
>  a better way to remove it with out scrubbing?