Hi

I am looking for a process to remove Polyimide residues but not TiO2.  I
can remove most of the polyimide with a Microstrip 2001 solution but
there a still residues left. We know that a piranha clean would remove
these residues but we are uncertain if it also attacks the titanium dioxide
Does anyone have an idea how we can remove the polyimide without
damaging the (13-nm) TiO2 layer?
We also want to avoid the use of an O2-Plasma because that would damage
our transistors.

I hope you can help us


Florian Felderer
Abt. Membran- und Neurophysik
MPI für Biochemie
Am Klopferspitz 18s

82152 Martinsried

Tel.: +49 89 8578 2870
Fax.: +49 89 8578 2822