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MEMSnet Home: MEMS-Talk: Hf resistant Adhesion layer for Au on Si
Hf resistant Adhesion layer for Au on Si
2008-04-03
Heiko Prüßner
2008-04-03
Morrison, Richard H., Jr.
2008-04-03
Ruiz, Marcos Daniel (SENCOE)
2008-04-03
Brent Garber
2008-04-04
Michael Larsson
2008-04-09
Heiko Prüßner
2008-04-09
Shay Kaplan
2008-04-09
Jesse D Fowler
Hf resistant Adhesion layer for Au on Si
Jesse D Fowler
2008-04-09
Ti is vulnerable to HF. So, you may get some (or all) peeling if you use Ti.

Jesse Fowler


"Shay Kaplan"  writes:

Try to use Ti as adhesion layer.

Shay
reply
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