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MEMSnet Home: MEMS-Talk: Au peeling away from Cr adhesion layer
Au peeling away from Cr adhesion layer
2008-04-10
Petra Jusková
2008-04-10
Shay Kaplan
2008-04-10
Erkin Seker
2008-04-10
Ruiz, Marcos Daniel (SENCOE)
2008-04-10
David Nemeth
2008-04-11
张玉 Zhang Yu, Aaron
2008-04-11
[email protected]
2008-04-11
Wilson, Thomas
2008-04-11
Aarthi Lavanya Dhanapaul
Au peeling away from Cr adhesion layer
Petra Jusková
2008-04-10
We sputter coated 100 mn Cr adhesion layer onto glass wafer.
Using same device, we sputter 500 nm Au layer, directly to Cr.
Then we using spin coater make the final photoresist layer.
After developing, we try to etch gold layer, using TFA ( KI : I2 : H2O,
4:1:40),
but after few seconds, Au layer starts peeling away from the Cr.
Instead of etching, we wash Au layer out.
Can you help us, how to etch Au with desired pattern?

thank you.
reply
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