A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: DRIE in industry?
DRIE in industry?
2008-04-10
Mikael Evander
2008-04-10
gilgunn
2008-04-10
Robert Black
2008-04-18
[email protected]
2008-04-23
Albert Henning
2008-04-23
Richard E. Tasker
2008-04-23
Xiaoguang Liu
2008-04-11
Doug Stewart
2008-04-12
Ahmet Varilci
2008-04-15
Jie Zou
DRIE in industry?
Mikael Evander
2008-04-10
Hi.

Does anyone know how common DRIE really is in industry? It seem to
more or less be a fairly common tool in university labs, but is it
actually used in real facilities doing massfabrication as well? I've
always heard that it is slow/expensive and not suited for parallel
processing but the technique should have been refined pretty much
over the years, no?

kind regards

Mikael
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Mentor Graphics Corporation
Nano-Master, Inc.
University Wafer