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MEMSnet Home: MEMS-Talk: Au peeling away from Cr adhesion layer
Au peeling away from Cr adhesion layer
2008-04-10
Petra Jusková
2008-04-10
Shay Kaplan
2008-04-10
Erkin Seker
2008-04-10
Ruiz, Marcos Daniel (SENCOE)
2008-04-10
David Nemeth
2008-04-11
张玉 Zhang Yu, Aaron
2008-04-11
[email protected]
2008-04-11
Wilson, Thomas
2008-04-11
Aarthi Lavanya Dhanapaul
Au peeling away from Cr adhesion layer
[email protected]
2008-04-11
In our process, there is a small co-deposition layer that ensures Cr/Au
adhesion, but we use evaporators and not sputtering systems.  Don't know if
you can do that.

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