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MEMSnet Home: MEMS-Talk: DRIE in industry?
DRIE in industry?
2008-04-10
Mikael Evander
2008-04-10
gilgunn
2008-04-10
Robert Black
2008-04-18
[email protected]
2008-04-23
Albert Henning
2008-04-23
Richard E. Tasker
2008-04-23
Xiaoguang Liu
2008-04-11
Doug Stewart
2008-04-12
Ahmet Varilci
2008-04-15
Jie Zou
DRIE in industry?
Ahmet Varilci
2008-04-12
Hi
I am using e-beam litography to make holes on PMMA then I need to etch holes on
BiSrCaCuO and YBaCuO thin film.
Do anyone know if I can etch 100 nm holes on the BiSrCaCuO and YBaCuO thin film
by RIE?
or which method could give better performance for that?
Thanks
Ahmet
reply
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