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MEMSnet Home: MEMS-Talk: DRIE in industry?
DRIE in industry?
2008-04-10
Mikael Evander
2008-04-10
gilgunn
2008-04-10
Robert Black
2008-04-18
[email protected]
2008-04-23
Albert Henning
2008-04-23
Richard E. Tasker
2008-04-23
Xiaoguang Liu
2008-04-11
Doug Stewart
2008-04-12
Ahmet Varilci
2008-04-15
Jie Zou
DRIE in industry?
Jie Zou
2008-04-15
My guess would be it's always possible to ion bombard those away? Just
try Ar and tune the bias. Be careful the PMMA lasts longer than the
film.

If the film is really thin, I don't see the reason to go to Deep RIE.

On Sat, Apr 12, 2008 at 3:40 AM, Ahmet Varilci  wrote:
> Hi
>  I am using e-beam litography to make holes on PMMA then I need to etch holes
on BiSrCaCuO and YBaCuO thin film.
>  Do anyone know if I can etch 100 nm holes on the BiSrCaCuO and YBaCuO thin
film by RIE?
>  or which method could give better performance for that?
>  Thanks
>  Ahmet

* Zou Jie (Jay)
* Department of Physics
* University of Florida
* Tel: +1-352-846-8018
* Email: [email protected]
* Homepage: http://plaza.ufl.edu/zoujie/
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