Does boron also have an output energy?
-----Original Message-----
Dear MEMS researchers,
I am currently working on a polysilicon thermocouple(3000A thickness),
and would like to ask some questions regarding the fabrication process.
I would like to know about the input energy of boron and resistivity of
polysilicon when doped with different dosage and temperature conditions.
Also I wonder about the relationship between annealing temperature and
time.
If you have any procedures in fabricating thermocouple using
polysilicon, I would be grateful if you can share them with me.
Sincerely yours
BongSeop Kwak
Yonsei University