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MEMSnet Home: MEMS-Talk: Passivation of ITO with SiO2
Passivation of ITO with SiO2
2008-04-17
Rafael Garc=?US-ASCII?Q?=ED?=a Valverde
2008-04-17
walter
Passivation of ITO with SiO2
walter
2008-04-17
Yes we do however we also do spin coating of glass and sol-gel both are
much less costlier and faster.
good luck
walter
www.elume.com
----- Original Message -----
From: "Rafael Garcma Valverde" 
To: "General MEMS discussion" 
Sent: Thursday, April 17, 2008 6:31 AM
Subject: [mems-talk] Passivation of ITO with SiO2

Hi everybody,

I know that once ITO is sputtered over glass substrate, some companies
offer it with a thin layer of SiO2 for passivation.

Does anyone know if this layer is also sputtered?

reply
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