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MEMSnet Home: MEMS-Talk: DRIE in industry?
DRIE in industry?
2008-04-10
Mikael Evander
2008-04-10
gilgunn
2008-04-10
Robert Black
2008-04-18
[email protected]
2008-04-23
Albert Henning
2008-04-23
Richard E. Tasker
2008-04-23
Xiaoguang Liu
2008-04-11
Doug Stewart
2008-04-12
Ahmet Varilci
2008-04-15
Jie Zou
DRIE in industry?
[email protected]
2008-04-18
Here is a very recent article on DRIE and MEMS:

http://ap.pennnet.com/display_article/325749/36/ARTCL/none/n-
one/1/DRIE-for-MEMS-devices/

Mike



Quoting Robert Black :

> I don't think DRIE is currently very common in the industry. When(if?) 3-D
> Through silicon vias catches on, that will change though.
>
> Robert
>
reply
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