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MEMSnet Home: MEMS-Talk: SiO2 growth on bare silicon
SiO2 growth on bare silicon
2008-04-19
Jose Guevarra
2008-04-19
Peng Li
2008-04-23
Albert Henning
2008-04-19
Ravi Shankar
2008-04-19
Vossough
2008-04-21
jian zi
SiO2 growth on bare silicon
Jose Guevarra
2008-04-19
Hi,

   I've found that the grove-deal model of oxidation doesn't work well
for growing oxide on bare silicon waters.  What model should I use to
try to find the time to grow say a 200 angstrom layer of oxide (dry
and/or wet)?

Thanks.

-Jose
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