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MEMSnet Home: MEMS-Talk: SiO2 growth on bare silicon
SiO2 growth on bare silicon
2008-04-19
Jose Guevarra
2008-04-19
Peng Li
2008-04-23
Albert Henning
2008-04-19
Ravi Shankar
2008-04-19
Vossough
2008-04-21
jian zi
SiO2 growth on bare silicon
Ravi Shankar
2008-04-19
Hi Jose Guevarra,

 i think your problem is not because of bare silicon. its because of
thickness of oxide you want to grow. grove-deal model doesn't work
well for very thin oxides. likey you, i am also interested to know is
there any model available in literature to grow thin oxides (Say, 200
angstroms) with good controllability.

Regards,
Ravi Shankar.
reply
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