Hi Jose and Ravi,

I have used the following oxide calculator in the past
with quite good results:

http://www.lelandstanfordjunior.com/thermaloxide.html

At the lower left corner of the page you can see some
options are provided. Massoud's model is a commonly
used model for thin oxide calculations (although there
may be others that I am not aware of).

Regards,
--Kris


--- Ravi Shankar  wrote:
> Hi Jose Guevarra,
>
>  i think your problem is not because of bare
> silicon. its because of
> thickness of oxide you want to grow. grove-deal
> model doesn't work
> well for very thin oxides. likey you, i am also
> interested to know is
> there any model available in literature to grow thin
> oxides (Say, 200
> angstroms) with good controllability.

K. Vossough, Ph.D.
Nano and Micro Technology Consultants
E-mail: [email protected]
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http://www.memswork.net