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MEMSnet Home: MEMS-Talk: SiO2 growth on bare silicon
SiO2 growth on bare silicon
2008-04-19
Jose Guevarra
2008-04-19
Peng Li
2008-04-23
Albert Henning
2008-04-19
Ravi Shankar
2008-04-19
Vossough
2008-04-21
jian zi
SiO2 growth on bare silicon
jian zi
2008-04-21
Hi Jose,

  For thin oxide layer growth, that model is indeed not accurate.
  The best way to grow right thickness of oxide you needed is by experiment,
especially for thin oxide layer.


  Sincerely,
  Zhijian ZHOU
  HKUST
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