Teimor,
           Give me time to research this more.  I have lots of
experience in plasma activation of Teflon but after a few weeks it
returns to its original hydrophobicity.  A colleague of mine says he has
success with plasma activation flowed immediately with a chemical
treatment that a) clings to the activated Teflon and b) presents a
sticky molecule to the outside world for good adhesion I have other
acquaintances who have asked the same question so I will research it
some more.

  Bill Moffat Yield Engineering.

________________________________

From: [email protected] on behalf of Teimour Maleki
Sent: Sun 4/20/2008 8:34 PM
To: 'General MEMS discussion'
Subject: [mems-talk] Teflon Paterning



Dear all,
 I am trying to pattern a thin film of Teflon on silicon substrate. I tried
argon plasma activation, it seems fine, but I have problem with adhesion
of Teflon to silicon. When I do post processing, it will pill of. Any comments
on this will be appreciated very much.
Thanks,
-Teimour