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Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA 95008
408-379-9069 ext 101
[email protected]
-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Thursday, April 17, 2008 10:49 PM
To: [email protected]
Subject: Re: [mems-talk] DRIE in industry?
Here is a very recent article on DRIE and MEMS:
http://ap.pennnet.com/display_article/325749/36/ARTCL/none/n-
one/1/DRIE-for-MEMS-devices/
Mike