A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: DRIE in industry?
DRIE in industry?
2008-04-10
Mikael Evander
2008-04-10
gilgunn
2008-04-10
Robert Black
2008-04-18
[email protected]
2008-04-23
Albert Henning
2008-04-23
Richard E. Tasker
2008-04-23
Xiaoguang Liu
2008-04-11
Doug Stewart
2008-04-12
Ahmet Varilci
2008-04-15
Jie Zou
DRIE in industry?
Albert Henning
2008-04-23
This article is no longer available.

Albert K. Henning, PhD
Director of MEMS Technology
NanoInk, Inc.
215 E. Hacienda Avenue
Campbell, CA  95008
408-379-9069  ext 101
[email protected]

-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Thursday, April 17, 2008 10:49 PM
To: [email protected]
Subject: Re: [mems-talk] DRIE in industry?

Here is a very recent article on DRIE and MEMS:

http://ap.pennnet.com/display_article/325749/36/ARTCL/none/n-
one/1/DRIE-for-MEMS-devices/

Mike
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Addison Engineering
Process Variations in Microsystems Manufacturing
Nano-Master, Inc.
The Branford Group