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MEMSnet Home: MEMS-Talk: SU-8 partially concave sidewall profile problem
SU-8 partially concave sidewall profile problem
2008-04-22
郑瑞麟(Ruilin Zheng)
2008-04-22
Andrew Sarangan
2008-04-23
Gareth Jenkins
2008-04-23
Andrew Sarangan
2008-04-24
Gareth Jenkins
2008-04-25
郑瑞麟(Ruilin Zheng)
2008-04-25
Gareth Jenkins
2008-05-05
郑瑞麟(Ruilin Zheng)
2008-05-05
Oakes Garrett
SU-8 partially concave sidewall profile problem
Andrew Sarangan
2008-04-23
I am not exactly sure what the poster meant by 'concave'. Here is a
photo. If the structure looks like this, then the problem is
under-exposure. In fact, even the exposed sidewalls are not vertical
because the dose is decreasing with depth.
http://131.238.119.245/sarangan/SU8-profile.jpg
reply
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