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MEMSnet Home: MEMS-Talk: SU-8 partially concave sidewall profile problem
SU-8 partially concave sidewall profile problem
2008-04-22
郑瑞麟(Ruilin Zheng)
2008-04-22
Andrew Sarangan
2008-04-23
Gareth Jenkins
2008-04-23
Andrew Sarangan
2008-04-24
Gareth Jenkins
2008-04-25
郑瑞麟(Ruilin Zheng)
2008-04-25
Gareth Jenkins
2008-05-05
郑瑞麟(Ruilin Zheng)
2008-05-05
Oakes Garrett
SU-8 partially concave sidewall profile problem
郑瑞麟(Ruilin Zheng)
2008-04-25
The profile is more close to the second one.
but the upper part seems vertical, and the lower part close to substrate is
inclined

On Thu, Apr 24, 2008 at 9:13 PM, Gareth Jenkins 
wrote:

> Ruilin, could you clarify what profile you are getting?
>
> Is is wider at the bottom, i.e. something like this:
>           ___
>           I    I
>           I    I
>           I    I
>          /     \
> _____/        \_____
>
> Or is it more like this:
>        _______
>         \         /
>          \       /
>           I      I
>           I      I
> ______I      I________
>
> I hope my attempt at ascii art works!

--
Best Regards,

Ruilin Zheng

Address:
Pen-Tung Sah MEMS Research Center,
Xiamen University, Xiamen,361005,
P.R.China
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