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MEMSnet Home: MEMS-Talk: Chromium removal
Chromium removal
2008-04-28
Ho Yin Chan
2008-04-28
sokwon Paik
2008-04-28
Kirt Williams
Chromium removal
Ho Yin Chan
2008-04-28
Hi all,

 Currently, I am etching PECVD oxide using standard RIE and Cr is the
masking layer. However, I found that I cannot remove the Cr mask using
Cr etch after going through the RIE process. I am wondering if there
is anything happened on the Cr surface. I'd like to see if you could
give me some suggestions on how to remove the top Cr layer. Thanks

HY
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