The Madou book is fantastic and a very in depth source for
information.  It is hard for me to judge now though if it would have
been hard for me to read it as an undergrad though.

When I was in undergrad I started with "Micromachined Transducers
Sourcebook" by Gregory Kovacs and it is what really got me hooked on
MEMS.  It has a great overview of everything without going too quickly
into the details.  Kovacs and Madou are a great couple of books.

Nicolas Duarte
Ph.D. Candidate at Penn State University


On May 7, 2008, at 2:43 PM, Jose Guevarra wrote:

> Hi,
>
> I'm an undergrad whose getting serious about microfab.  I have two
> books (one is science and engineering of microelectronic fab by
> cambell)
> but I don't think either is geared toward entry level/ undergrad level
> students.  Can anyone recommend a good book with lot's of worked out
> examples and clear
> explanations of material concepts?