Dear all,

 Does anybody know what is the effect of IPA on Teflon AF coated substrate?
When I used IPA, it will remove the Teflon.
Thanks for your kind help in advance.

-Teimour

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of SEBESTA Edward
Sent: Monday, April 21, 2008 9:17 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Teflon Paterning

I think you will need a specialty chemical to do adhesion promotion. One
end of the molecule will need to bond to the silicon and the other end
will need to be a fluorocarbon chain. Something like
Hexamethyldisilizane with one of the methyls a fluorocarbon chain. You
probably need to have a pretreatement of sulfuric peroxide to populate
the silicon surface with OH groups.

The adhesion molecule will bind to the subtrate and then form a
compatible surface for the Teflon. You might want to get very exotic and
have some reactive groups on the fluorocarbon end also. So you do the
prime at one temperature and then bake the spun on Teflon at a higher
temperature to activate the groups. I am not sure what those groups
would be that would react with Teflon. Perhaps a R-Mg-R entity. A
Grignard reagent type group. The problem is that they decompose readily.

I know others have tried, but they abandoned efforts to do it. So I
think you will be a pioneer in this.

Ed