I have a problem in simulating RF mems switch in ansys.
please mail me an example in ansys.
thanks so much.


On 5/10/08, [email protected]  wrote:
>
> Hi all,
>
> I have made a microfluidic Opto-Biochip in SU8 2050 on a glass substrate.
> Now I need to cap this with another optically clear material such as glass,
> PDMS, PMMA or any other material that may do the job. Up to now we haven't
> had success in bonding any of these materials to SU8 after post exposure
> bake. Does anybody know a material and the process that may work as a cap
> for SU8 chip.
>
> Suggestions are greatly appreciated.