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MEMSnet Home: MEMS-Talk: Gold evaporation coating on silicon - thermal treatment for adhesion
Gold evaporation coating on silicon - thermal treatment for adhesion
2008-05-10
Moshe
Gold evaporation coating on silicon - thermal treatment for adhesion
2008-05-12
Suraj Patil
Gold evaporation coating on silicon - thermal treatmentfor adhesion
2008-05-12
Brubaker Chad
Gold evaporation coating on silicon - thermal treatment for adhesion
Moshe
2008-05-10
Last week I asked about an adhesion coating achieved
between gold and silicon.

Since then I've heard about a  different way to achieve that.

I talked about thermal treatment so the gold coating
absorb to the silicon, at that way the adhesion obtain
with no third layer.

The general thermal treatment recipe is heating to 400
Celsius degrees for few hours in inert environment.
Has anyone done that before?

Whet is the exact recipe for this treatment ?

Thank you

reply
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