Have you tried a UV cure adhesive?  You might be able to apply this to
the top surface of the SU-8 structure and then use a bonder plus UV
energy to form the bond to the cap glass.


Best Regards,
Garrett Oakes

EV Group
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Application Engineer - Direct: +1 (480) 305 2443, Main: +1 (480) 305
2400 Fax: +1 (480) 305 2401
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-----Original Message-----
From: [email protected] [mailto:[email protected]]
Sent: Friday, May 09, 2008 1:10 PM
To: General MEMS discussion
Subject: [mems-talk] Material for capping a SU8-2050 Microfluidic
Opto-BioChip

Hi all,

I have made a microfluidic Opto-Biochip in SU8 2050 on a glass
substrate.
Now I need to cap this with another optically clear material such as
glass, PDMS, PMMA or any other material that may do the job. Up to now
we haven't had success in bonding any of these materials to SU8 after
post exposure bake. Does anybody know a material and the process that
may work as a cap for SU8 chip.