Material for capping a SU8-2050
Microfluidic Opto-BioChip
eowin rohan
2008-05-12
Hi,
Garret is right, an UV adhesive should work fine, but
you could even try with a new SU-8 layer: spin coat
SU-8 on the substrate cap (glass, PC,...), do the soft
bake and put the cap over your device with the SU-8
layer in contact with your device, expose it to UV and
finally do the hard bake again, you will get a nice
transparent cap.
I hope it helps
Eowin
> -----Original Message-----
> From: [email protected] [mailto:[email protected]]
>
> Sent: Friday, May 09, 2008 1:10 PM
> To: General MEMS discussion
> Subject: [mems-talk] Material for capping a SU8-2050
> Microfluidic
> Opto-BioChip
>
> Hi all,
>
> I have made a microfluidic Opto-Biochip in SU8 2050
> on a glass
> substrate.
> Now I need to cap this with another optically clear
> material such as
> glass, PDMS, PMMA or any other material that may do
> the job. Up to now
> we haven't had success in bonding any of these
> materials to SU8 after
> post exposure bake. Does anybody know a material and
> the process that
> may work as a cap for SU8 chip.