Nataraj,
To get  a good reflective layer of Aluminium, I would check the following
parameters: Good vacuum in the chamber, substrate quality & the layer on the
substrate, the rate of deposition and if required backside heating of the
substrate depending on the thickness of the layer to be deposited.
May be you should give some more information on your process and the substrate
which you use to solve the problem.

Ravi Kumar.K


________________________________

From: [email protected] on behalf of Nataraj
Sent: Mon 5/19/2008 3:22 PM
To: [email protected]
Subject: [mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING



HAI,

        CAN ANY ONE GIVES IDEAS AS HOW TO IMPROVE THE WHITISH COLOR OF
SPUTTERED ALUMINUM, RIGHT NOW MY SPUTTERED AL COLOR IS SILVER IN COLOR, ANY
SUGGESTION TO IMPROVE THE BRIGHTNESS AND COLOR OF IT ?

Regards,

Nataraj Santhanam