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MEMSnet Home: MEMS-Talk: HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING
HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING
2008-05-19
Nataraj
2008-05-19
Brent Garber
2008-05-19
Andrew Sarangan
2008-05-20
Nataraj
2008-05-19
Ravikumar_Kuppan
2008-05-19
walter
Aluminum sputtering and evaporation
2008-05-20
Sreemanth M Uppuluri
2008-05-20
Gary Hillman
2008-05-20
Shay Kaplan
HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING
walter
2008-05-19
There are,a few possibilities .
In the past I have seen this with my own Al films.
A  the chamber is contaminated
B  the base pressure was not low enough prefer low sis minimum
C  leaks in the chamber like O2.
Is the chamber pumped using diffusion you need an LN trap
If all these areas are covered in theory the film should not look milky
Walter
www.elume.com

----- Original Message -----
From: "Nataraj" 
To: 
Sent: Monday, May 19, 2008 2:52 AM
Subject: [mems-talk] HELP REQUIRED IN AREA OF ALUMINUM SPUTTERING


> HAI,
>
>        CAN ANY ONE GIVES IDEAS AS HOW TO IMPROVE THE WHITISH COLOR OF
> SPUTTERED ALUMINUM, RIGHT NOW MY SPUTTERED AL COLOR IS SILVER IN COLOR,
> ANY
> SUGGESTION TO IMPROVE THE BRIGHTNESS AND COLOR OF IT ?
>
> Regards,
>
> Nataraj Santhanam
>
>

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