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MEMSnet Home: MEMS-Talk: PR removal after ICP RIE etching
PR removal after ICP RIE etching
2008-05-20
Satish Yeldandi
2008-05-20
Andrew Sarangan
2008-05-20
Satish Yeldandi
2008-05-20
Ngo Ha Duong
2008-05-20
Tolga YELBOGA
2008-05-20
Oakes Garrett
2008-05-21
Jason Milne
2008-05-23
Jie Zou
2008-05-23
乔大勇
PR removal after ICP RIE etching
Satish Yeldandi
2008-05-20
Hi!

I have problem removing photo resist after using it as mask for
ICP-RIE etching. I tried Acetone, Acetone+Sonication, PR stripper,
Asher. Nothing is working. Did anyone face this problem before. If
anyone has any solution for this problem please tell me.

Thanks
Satish
reply
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