Hi;

As we know Al is very wettable material.Therefore evaporation of Alimunium
is very problematic. You can try to give current very slowly or use Alimuna
boat. But it's hard to use therefore breakable problem.

In addionally the the quality of boats of evaporation can be change
according to manufacturer.

Tolga YELBOGA
Project Engineer
Nanotechnology Researh Center
Bilkent University
Bilkent, Ankara 06800 TURKEY
Voice: 90-312-290-1020
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: X.P. Zhu [mailto:[email protected]]
Sent: Friday, May 30, 2008 5:52 PM
To: General MEMS discussion
Subject: Re: [mems-talk] Damaging of boats during nickel evaporation

Hi,

   I met similar problem when I evaporated Al by
tungsten boat. When Al melted in tungsten boat, the
evaporation rate suddenly reduced and after a while
the boat was "ate" by the melted Al. So I can not
obtain thick Al film. Does anyone know this and give
some hint? Thank you very much.

Zhu X. P.


--- Tolga YELBOGA 写道:

> Hi;
> You should use tungsten or molybdenium boat for
> nickel or gold. Most
> suitable materials are these because of their
> thermal properties. Alimuna is
> very strong material. But if suddenly temperature to
> be different (hot or
> cold), alimuna will be damaged.
>
> Solutions;
> * You can use different type boat that i said that
> * You can evaporate very very slowly (But it can be
> caused of different
> problems.)
>
>