We can have the desired thickness, but after the developping(the developping
time is longer than 10mins), the 10um feature is gone and other bigger feature
get little distorted. I believe there are something wrong with the baking and
exposure, but not very clear which one need to be fine-adjusted or corrected.

Any comments

Michael

-----Original Message-----
From: [email protected] [mailto:[email protected]] On
Behalf Of 李加东
Sent: 2008年6月3日 17:10
To: [email protected]
Subject: Re: [mems-talk] 20um features using AZP4620

you can use spray coating