I haven't worked with the P4000 series resist, but in your earlier message
you said you we coating at 38um. According to some literature I have from
AZ, the max aspect ratio for this resist at 2:1 so 10um features will
probably be gone.

Robert

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Haixin Zhu
Sent: Wednesday, June 04, 2008 1:23 PM
To: General MEMS discussion
Subject: Re: [mems-talk] 20um features using AZP4620

We can have the desired thickness, but after the developping(the developping
time is longer than 10mins), the 10um feature is gone and other bigger
feature get little distorted. I believe there are something wrong with the
baking and exposure, but not very clear which one need to be fine-adjusted
or corrected.

Any comments

Michael