Thanks, Robert,

My main concern is that the bigger pattern (>200um) are distored, with =
clear undercut and edge distortion, any comments on this?

Thanks

Michael

________________________________

From: [email protected] on behalf of Robert Black
Sent: Wed 6/4/2008 2:36 PM
To: 'General MEMS discussion'
Subject: Re: [mems-talk] 20um features using AZP4620

I haven't worked with the P4000 series resist, but in your earlier =
message
you said you we coating at 38um. According to some literature I have =
from
AZ, the max aspect ratio for this resist at 2:1 so 10um features will
probably be gone.

Robert