Andreas,

We've used Cl/Ar chemistry on an ICP etcher to etch Ti for a few years
with success.  The selectivity to SiO2 is quite good but we did not try
SiN.

Trent


Andreas Fischer wrote:
> Hi!
>
> Does anyone know if there is a way to dry etch titanium selectively to
> SiN? Standard (fluorine / chlorine based-) RIE etching techniques for
> Ti are showing rather poor selectivity.