A MEMS Clearinghouse® and information portal
for the MEMS and Nanotechnology community
RegisterSign-In
MEMSnet Home About Us What is MEMS? Beginner's Guide Discussion Groups Advertise Here
News
MEMSnet Home: MEMS-Talk: 20um features using AZP4620
20um features using AZP4620
2008-06-03
Haixin Zhu
2008-06-04
李加东
2008-06-04
Haixin Zhu
2008-06-04
Robert Black
2008-06-04
Haixin Zhu
2008-06-13
Brubaker Chad
2008-06-13
Haixin Zhu
2008-06-15
Tolga YELBOGA
2008-06-16
Oakes Garrett
2008-06-04
Tolga YELBOGA
2008-06-04
Haixin Zhu
2008-08-06
Pradeep Dixit
20um features using AZP4620
Tolga YELBOGA
2008-06-15
Hi;
You can not obtain 65 um thick resist using single coating by  AZ 9260. You have
to coat multiple.

Tolga YELBOGA
Project Engineer
Nanotechnology Researh Center
Bilkent University
Bilkent, Ankara 06800 TURKEY
Voice: 90-312-290-1020
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: Haixin Zhu [mailto:[email protected]]
Sent: Friday, June 13, 2008 11:43 PM
To: General MEMS discussion
Subject: Re: [mems-talk] 20um features using AZP4620

Dear Chad,

U are right. Though I succeeded in making 38um thick pattern with 20um feature
size, there is still some problem with undercut of the pattern and bottom
residue. I will try AZ 9260, and hoping you can send me your processing traveler
so I can use as reference and start point.

Thanks

Michael
reply
Events
Glossary
Materials
Links
MEMS-talk
Terms of Use | Contact Us | Search
MEMS Exchange
MEMS Industry Group
Coventor
Harrick Plasma
Tanner EDA
Nano-Master, Inc.
Tanner EDA by Mentor Graphics
Process Variations in Microsystems Manufacturing
Harrick Plasma, Inc.