Hi;
You can not obtain 65 um thick resist using single coating by  AZ 9260. You have
to coat multiple.

Tolga YELBOGA
Project Engineer
Nanotechnology Researh Center
Bilkent University
Bilkent, Ankara 06800 TURKEY
Voice: 90-312-290-1020
http://www.nanointurkey.com
http://www.nanotam.bilkent.edu.tr

-----Original Message-----
From: Haixin Zhu [mailto:[email protected]]
Sent: Friday, June 13, 2008 11:43 PM
To: General MEMS discussion
Subject: Re: [mems-talk] 20um features using AZP4620

Dear Chad,

U are right. Though I succeeded in making 38um thick pattern with 20um feature
size, there is still some problem with undercut of the pattern and bottom
residue. I will try AZ 9260, and hoping you can send me your processing traveler
so I can use as reference and start point.

Thanks

Michael