Andrea
HF doesn't react with Silicon. However, once native oxide forms on the
Silicon, it will be etched off. I would guess ~15A per hour but I don't know
this for sure.
Shay

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Andrea Mazzolari
Sent: Saturday, June 21, 2008 12:43 AM
To: General MEMS discussion
Subject: Re: [mems-talk] Glass to Kovar anodic bonding

Hi all,
from my knowledge, silicon is slowly etched by HF. Is this information
correct ? Which is the etch rate ?
Many thanks,
Andrea