Tell me more about the critical dry procedure.  I manufacture vacuum
driers and anti stiction coating equipment.  I may have a suggestion.

Bill Moffat

-----Original Message-----
From: [email protected]
[mailto:[email protected]] On Behalf Of Ramakrishna Kotha
Sent: Thursday, June 26, 2008 12:34 AM
To: [email protected]
Subject: [mems-talk] Critical Dry

Hi,

I am performing critical dry to release a parallel plate structure,
which has SiO2 as a sacrificial layer

After removing the sacrifical layer-SiO2 with BOE, then the device is
transffered to DI Water and then to Acetone in the critical dry chamber.
After performig critical dry process using Polaron-CPD 7501 tool, all
the structures are damaged (due to stiction problem).

Can anyone, suggest me the accurate process to perform critical dry.


Thanks in advance
Rama
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