MEMS-talk

News	MEMSnet Home: MEMS-Talk: KOH etching of doped (P,As) Si wafers KOH etching of doped (P,As) Si wafers 2008-07-04 P.E.M. Kuijpers 2008-07-07 Adam Sossalla KOH etching of doped (P,As) Si wafers P.E.M. Kuijpers 2008-07-04 Hi All, Is the etch behaviour (in 33% KOH) of highly doped Si wafers the same as un-doped Si wafers. Thanks in advance. Peter Kuijpers MiPlaza mailto:[email protected] reply
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