Hello, everyone

the hot plate is of about 20cm in diameter, with a metal lid on top, and the
lid roof is about 3cm  from the hot plate.
Do you think it is too close for the lid to hot plate?


On Mon, Jul 7, 2008 at 5:13 PM, Nodes Norbert  wrote:

> There could be also a different reason for these islands.
> What does the bake module look like?
> Is the volume between wafer and bake module cover very low?
> It can happen that the solvent condenses inside the bake module at cold
> spots and create droplets. Then, these solvent droplets can drip down on the
> wafer and cause the islands.
> It seems the bake module can handle the solvent fume volume with 2" wafers.
> But with 4" wafers, there is too much of it.
>
> First approach to solve this increasing the bake module's exhaust rate.
>
> Best regards,
> Norbert Nodes

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