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MEMSnet Home: MEMS-Talk: TMAH solution photosensitivity
TMAH solution photosensitivity
2008-07-08
Kvel Bergtatt
2008-07-09
Starzynski, John
2008-07-16
Moshe
2008-07-16
Shay Kaplan
TMAH solution photosensitivity
Kvel Bergtatt
2008-07-08
Hi all!

i'm wondering if somebody can lead me to the right point where i can find
evidence, if any of TMAH solutions affected by light. i have observed
different etch rates on poly Si and wondering if light could affect
quaternary amines ability to etch Si.

thanks in advance!

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_fm
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