Silicon wet etch can be affected by light - especially of it is not highly
doped. The reaction need available electrons and light provides e/h pairs

-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Moshe
Sent: Wednesday, July 16, 2008 11:11 AM
To: [email protected]
Subject: Re: [mems-talk] TMAH solution photosensitivity

But the main question remain -  if any of TMAH solutions affected by light ?
Just now I start to work with the TMAH and I  also want to know the answer.
Thank you