Effect of EDP/KOH on PDMS and photopatternable silicone
Anurag Tripathi
2008-07-17
Hello,
I wanted to know if anyone of you has an experience with performing
EDP/KOH etch of a Si wafer with PDMS or photopatternable silicone WL
5150 patterned on the back side. Does the EDP/KOH etch damage the PDMS
or the photopatternable silicone?
Thank you very much,
Anurag Tripathi