KOH doesn't affect PDMS
Shay
-----Original Message-----
From: [email protected] [mailto:[email protected]]
On Behalf Of Anurag Tripathi
Sent: Thursday, July 17, 2008 7:06 PM
To: [email protected]
Subject: [mems-talk] Effect of EDP/KOH on PDMS and photopatternable silicone

Hello,

I wanted to know if anyone of you has an experience with performing
EDP/KOH etch of a Si wafer with PDMS or photopatternable silicone WL
5150 patterned on the back side. Does the EDP/KOH etch damage the PDMS
or the photopatternable silicone?

Thank you very much,

Anurag Tripathi