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MEMSnet Home: MEMS-Talk: Gold Etchant with selectivity over Mo
Gold Etchant with selectivity over Mo
2008-07-21
Chong Xie
2008-07-23
Moshe
2008-07-23
Kevin Paul Nichols
Gold Etchant with selectivity over Mo
Chong Xie
2008-07-21
Hello everyone,

I am looking for some etchant that can etch away Au and leave Mo. I tried
KI/I2, but it seems it etched Mo as well.

Any input is appreciated, and thanks in advance.

--
Chong Xie
Ph. D Candidate
Cui Group
The Geballe Laboratory for Advanced Materials
476 Lomita Mall, Stanford University
Stanford, CA 94305

reply
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