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MEMSnet Home: MEMS-Talk: Pellicle life
Pellicle life
2008-07-26
Muk Mei Yu
2008-07-28
Oakes Garrett
2008-07-28
Muk Mei Yu
2008-07-29
Oakes Garrett
Pellicle life
Muk Mei Yu
2008-07-26
Hi,

I'm using pellicle on PE mask plate and suffering high pellicle breakages. Let's
set aside handling issue, does anyone know what are the factors that can affect
pellicle life?

Thanks,
Muk

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