Hi Muk,

Could you provide more detail on system type, exposure, etc.?  However,
in my experience, most pellicle damage occurred when the reticle was
loaded onto the reticle stage.  Manually loaded Ultratech steppers had a
higher breakage rate than automatically loaded systems (UTS, Canon,
Nikon, ASML, etc.)

Best Regards,


Garrett Oakes
EV Group

-----Original Message-----
From: Muk Mei Yu [mailto:[email protected]]
Sent: Friday, July 25, 2008 10:26 PM
To: [email protected]
Subject: [mems-talk] Pellicle life

Hi,

I'm using pellicle on PE mask plate and suffering high pellicle
breakages. Let's set aside handling issue, does anyone know what are the
factors that can affect pellicle life?

Thanks,
Muk